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压力传感器原理[0]

Posted on 2023年11月14日 by

  • 压电式压力计

压电式力传感器在装配时用顶螺纹给晶片组件一定的预紧力,以保证活塞、砧盘、晶片、电导片之间压紧,避免受冲击时因有间隙晶片损坏,并提高传感器的固有频率。

压电式压力传感器对温度变化较为敏感,须进行补偿:一种是水冷的办法以防止温度的影响;另一种是在晶片的前面安装一块金属片,选用线膨胀系数大的金属(如纯铝等),当温度变化时补偿片的线膨胀可以弥补晶体与金属线膨胀之间的差值,以保证预紧力的稳定。这两种办法常同时使用。

  • 压阻式压力计

硅压阻式压力计由外壳、硅膜片和引线等组成。其核心部分是做成杯状的硅膜片。在硅膜片上,用半导体工艺中的扩散掺杂法做成四个相等的电阻,接成全桥,并用引线引出。

  • 弹簧管压力计

  • 补充:

陶瓷压力传感器不需要进行封装,可以直接组装使用,成本较低,因此在汽车、工业等领域具有广泛的应用。不锈钢压力传感器通常具有全密封结构,无泄漏、耐腐蚀、高可靠,适合矿井、船舶等各种恶劣工况。MEMS 压力传感器中,膜片封装的应用最广泛,是工业压力传感器的主要类型。

 

参考资料:

  1. 测试技术 东南大学 课件
  2. 压力传感器发展现状综述_盛文军
  3. https://www.fanlog.org/2020/09/15/%e4%b8%8d%e9%94%88%e9%92%a2%e5%8e%9a%e8%86%9c%e6%8a%80%e6%9c%af/

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